Classification of Defects in Crystalline solids
polycrystalline solid - contains several crystalline regions which are randomly oriented
Most crystalline materials have many defects.
Some (like Silicon) can be grown with relatively few defects.
Three types of defects:
1. Planar defects - grain boundaries
interfaces between two single crystal regions of different orientation2. line defects - dislocations
atoms at grain boundaries tend to be loosely bound
=> more reactive (corrosion) and accelerated diffusion along grain boundaries
typical grain sizes: 0.01 mm - 100 mm (micron)
How many atoms in a solid are at grain boundaries ?
rough model:Number of grain boundaries in film (grain size) depends on deposition rate and substrate temperature.
assume grains are all cubes with sides of length l
l = grain size
a = atomic lattice parameter
n = number of atoms in one row of the grain
then, l = na
What would be the result for spherical grains of diameter, l ?
A somewhat better argument using truncated octahedra leads to the fraction being about 3.35 (a/l). (See Christian "Theory of Transformations in Metals and Alloys", p. 332).
example:
for l = 0.1 micron (1000 Angstroms) and a = 3 Angstroms about 10 atoms out of 1000 are at grain boundaries (1 %)
generally:
- lower T => smaller grains => many boundaries
- hight T => larger grains => fewer boundaries grain size is often proportional to film thicknes
(thinner films tend to have smaller grains)
example: edge dislocation - from inserting an extra row of atoms distorts lattice => stresses (compression and tension) very common: often 1010 - 1012 dislocations/ cm2 in films form from:3. point defects
- film growth process
- dislocations in substrate continuing into film
- contamination on substrate
- self interstitial - extra atom
- vacancy - missing atom
- substitutional impurity - impurity atom in lattice
- interstitial impurity - impurity atom not in regular lattice site
in principle you can eliminate all of these except vacancies
vacancies arise from thermodynamics (entropy)
fraction of vacancies (f)
point defects often arise from
- where kB = Boltzmann's constant = 1.381 x 10-23 J/K
typically Ef is about 1 eV
at room temperature, f is about 10-17
- fast deposition
- low substrate temperatures => no time for atoms to move to crystal lattice sites
Surface Roughness
films always have some statitistical distribution of thickness across the film in the worst case:
generally observed less roughness
Duque Franky
C.I: 15.990.445
CRF
http://www.uccs.edu/~tchriste/courses/PHYS549/549lectures/defects.html
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